UPW (Ultrapure water)
Ultrapure water refers to water with an electrical conductivity of less than 0.1μs/cm and a residual salt content of less than 0.3mg /L at 25C, using RO reverse osmosis technology and EDI (manufacturing technology combining ion exchange membrane technology and ion electromigration technology) technology.
General process
Pretreatment → Reverse osmosis → intermediate water tank → Water pump →EDI device → pure water tank → pure water pump → UV sterilizer → Polished mixing bed →O.2/0.5μm precision filter → outlet water(≥ 18mΩ.cm)
Outlet water quality
The water quality meets ASTM standards
Conductivity <0.1μs/cm TOC value: <3ppb
Bacterial content <1CFU/ml Adaptive water temperature: 5.0 ~ 40.0°C
Scope and field of application:
Electronics, electricity, biology, pharmaceuticals, petroleum, glass and other fields;For example, semiconductor chips, semiconductor chips, optical communication, computer components, capacitor clean products and various components and other production processes with high purity water.
